Combined magnetron sputtering and pulsed laser deposition of TiO 2 and BFCO thin films | Scientific Reports
High power fast pulsed magnetron discharges
Pulsed Hybrid Reactive Magnetron Sputtering for High zT Cu2Se Thermoelectric Films - Perez‐Taborda - 2017 - Advanced Materials Technologies - Wiley Online Library
Pulsed DC
Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties - ScienceDirect